Mahalik, Nitaigour Premachand. <br/><br/>
MEMS / 
Nitaigour Premachand Mahalik 
 - 5th ed. 
 - New Delhi :  Tata Mcgraw-Hill ,   c2009. 
 - xviii, 500p.:  ill. ;  24 cm. 
<br/><br/>Includes Bibliographical references and index. 
<br/><br/>
<br/><br/><br/>English. 
<br/><br/><label>ISBN: </label>9780070634459 0070634459 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381/MAM