Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems :  design, manufacture, and nanoscale engineering / 
Tai-Ran Hsu. 
 - 2nd ed. 
 - New Jersey :  John Wiley & Sons, Inc.,  c2008. 
 - xxv,550p. :  ill. ;  24 cm. 
<br/><br/> Includes index. 
<br/><br/>Includes bibliographical references (p. 509-521). 
<br/><br/><br/> 
<br/><br/>
<br/><br/><br/>english 
<br/><br/><label>ISBN: </label>9780470083017  
<br/><br/><label>LCCN: </label>2007017041 
<br/><br/><label>Nat. Bib. No.: </label>GBA813225  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>014507954  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Microelectronic packaging.
<br/><br/><label>LC Class. No.: </label>TK7874  / .H794 2008 
<br/><br/><label>Dewey Class. No.: </label>621.381/HSM