Microelectronic Processing/ An introduction to the Manufacture of Integrated Circuts W.Scot Ruska - 1st - New York McGraw-Hill Book Company C1988 - xviii, 430 p illustrations ; Table Figs,Photos 25 cm.

Includes Index




English

ISBN: 0070542805

Subjects--Topical Terms:
Integrated circuits--Design and construction

Dewey Class. No.: 621.38173/RUM