Ghandhi, Sorab Khushro, 1928-
VLSI fabrication principles : silicon and gallium arsenide /
Sorab K. Ghandhi.
- 2nd ed.
- New York : Wiley, c1994.
- xxiv, 834 p. : ill. ; 25 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471580058 (alk. paper)
93040716
Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.
TK7874 / .G473 1994
621.38152/GHV