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999 _c4178
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003 BD-ChUET
005 20191027152604.0
008 070423s2008 njua b 001 0 eng
010 _a 2007017041
015 _aGBA813225
_2bnb
016 7 _a014507954
_2Uk
020 _a9780470083017
035 _a(OCoLC)ocn123539645
040 _aDLC
_cDLC
_dBD-ChUET
050 0 0 _aTK7874
_b.H794 2008
082 0 0 _a621.381/HSM
_222
100 1 0 _aHsu, Tai-Ran.
245 0 1 _aMEMS and microsystems :
_bdesign, manufacture, and nanoscale engineering /
_cTai-Ran Hsu.
250 _a2nd ed.
260 _aNew Jersey :
_bJohn Wiley & Sons, Inc.,
_cc2008.
300 _axxv,550p. :
_bill. ;
_c24 cm.
500 _aIncludes index.
504 _aIncludes bibliographical references (p. 509-521).
505 0 _a
526 _aME
546 _aenglish
650 0 _aMicroelectronics.
650 0 _aMicroelectromechanical systems.
650 0 _aMicroelectronic packaging.
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/toc/ecip0716/2007017041.html
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
856 4 2 _3Contributor biographical information
_uhttp://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html
906 _a7
_bcbc
_corignew
_d1
_eecip
_f20
_gy-gencatlg
942 _2ddc
_cBK