| 000 | 01027cam a22003134a 4500 | ||
|---|---|---|---|
| 999 |
_c4232 _d4232 |
||
| 001 | 52959 | ||
| 003 | BD-ChUET | ||
| 005 | 20190207152108.0 | ||
| 008 | 010822s2002 maua b 001 0 eng | ||
| 010 | _a 2001044737 | ||
| 020 | _a0072393912 (alk. paper) | ||
| 040 |
_aBD-ChUET _cBD-ChUET _dBD-ChUET |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7874 _b.H794 2002 |
| 082 | 0 | 0 |
_a621.381/HSM _221 |
| 100 | 1 | _aHsu, Tai-Ran. | |
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign and manufacture / _cTai-Ran Hsu. |
| 260 |
_aBoston : _bMcGraw-Hill, _cc2002. |
||
| 300 |
_axii, 436 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references (p. 427-431) and index. | ||
| 526 | _aMIE | ||
| 546 | _aEnglish | ||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronic packaging. | |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
||