000 00729nam a22002417a 4500
999 _c6939
_d6939
001 17276
003 BD-ChUET
005 20191027151433.0
008 191027b ||||| |||| 00| 0 eng d
020 _a0070542805
040 _aBD-ChUET
_cBD-ChUET
082 _223
_a621.38173/RUM
100 _4Ruska,W.Scot.
245 _aMicroelectronic Processing/
_bAn introduction to the Manufacture of Integrated Circuts
_cW.Scot Ruska
250 _a1st
260 _aNew York
_bMcGraw-Hill Book Company
_cC1988
300 _axviii, 430 p
_b illustrations ; Table Figs,Photos
_c 25 cm.
500 _aIncludes Index
526 _aEEE
546 _aEnglish
650 _a Integrated circuits--Design and construction
942 _2ddc
_cBK