Ghandhi, Sorab Khushro, 1928-
VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi. - 2nd ed. - New York : Wiley, c1994. - xxiv, 834 p. : ill. ; 25 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471580058 (alk. paper)
93040716
Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.
TK7874 / .G473 1994
621.38152/GHV
VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi. - 2nd ed. - New York : Wiley, c1994. - xxiv, 834 p. : ill. ; 25 cm.
"A Wiley-Interscience publication."
Includes bibliographical references and index.
0471580058 (alk. paper)
93040716
Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.
TK7874 / .G473 1994
621.38152/GHV