Hsu, Tai-Ran.
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu. - 2nd ed. - New Jersey : John Wiley & Sons, Inc., c2008. - xxv,550p. : ill. ; 24 cm.
Includes index.
Includes bibliographical references (p. 509-521).
english
9780470083017
2007017041
GBA813225 bnb
014507954 Uk
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
TK7874 / .H794 2008
621.381/HSM
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu. - 2nd ed. - New Jersey : John Wiley & Sons, Inc., c2008. - xxv,550p. : ill. ; 24 cm.
Includes index.
Includes bibliographical references (p. 509-521).
english
9780470083017
2007017041
GBA813225 bnb
014507954 Uk
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
TK7874 / .H794 2008
621.381/HSM