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MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Hsu, Tai-Ran.
Material type: materialTypeLabelBookPublisher: Boston : McGraw-Hill, c2002Description: xii, 436 p. : ill. ; 24 cm.ISBN: 0072393912 (alk. paper).Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packagingDDC classification: 621.381/HSM
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Non-fiction 621.381/HSM (Browse shelf) 1 Not For Loan 52959
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621.381/HOE Electronics : 621.381/HOE Electronics : 621.381/HSM MEMS and microsystems : 621.381/HSM MEMS and microsystems : 621.381/HSM MEMS and microsystems : 621.381/HSM MEMS and microsystems : 621.381/HUI Introduction to electronics /

Includes bibliographical references (p. 427-431) and index.

MIE

English

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