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1. MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.

by Hsu, Tai-Ran.

Edition: 2nd ed.Material type: book Book; Format: print ; Literary form: Not fiction Publisher: New Jersey : John Wiley & Sons, Inc., c2008Online access: Table of contents only | Publisher description | Contributor biographical information Availability: Items available for loan: CUET CENTRAL LIBRARY [Call number: 621.381/HSM] (2). Items available for reference: CUET CENTRAL LIBRARY [Call number: 621.381/HSM] (1).

2. MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

by Hsu, Tai-Ran.

Material type: book Book; Format: print ; Literary form: Not fiction Publisher: Boston : McGraw-Hill, c2002Availability: Items available for reference: CUET CENTRAL LIBRARY [Call number: 621.381/HSM] (1).

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